Chemical vapor deposition quality prediction system based on support vector regression and fuzzy learning mechanism.
Jui-Yiao SuChing-Shun ChenPublished in: FUZZ-IEEE (2009)
Keyphrases
- support vector regression
- learning mechanism
- quality prediction
- singular spectrum analysis
- image quality
- chemical vapor deposition
- hybrid model
- regression model
- support vector
- learning process
- kernel function
- fuzzy logic
- learning algorithm
- support vector classification
- extreme learning machine
- support vector machine svm
- fuzzy sets
- hybrid genetic
- response surface methodology
- thin film
- complex valued
- support vector machine
- image processing
- learning rules
- fuzzy rules
- fuzzy systems
- feature selection
- fuzzy controller
- high density
- expert systems
- high quality
- fuzzy neural network
- search control knowledge
- neural network