First Monolithic Integration of Group IV Waveguide Photodetectors and Modulators on 300 mm Si Substrates for 2-μm Wavelength Optoelectronic Integrated Circuit.
Haibo WangGong ZhangYue ChenJishen ZhangKaizhen HanYi-Chiau HuangXiao GongPublished in: VLSI Technology and Circuits (2022)