Wafer Defect Inspection Optimization With Partial Coverage - A Numerical Approach.
Ming QinZhongshun ShiWeiwei ChenSiyang GaoLeyuan ShiPublished in: IEEE Trans Autom. Sci. Eng. (2021)
Keyphrases
- defect detection
- joint optimization
- optimization algorithm
- automated visual inspection
- global optimization
- numerical analysis
- optimization process
- sensitivity analysis
- optimization method
- optimization problems
- control system
- integrated circuit
- partial information
- multiscale
- discrete optimization
- production system
- data sets
- qualitative and quantitative
- constrained optimization
- artificial intelligence
- information retrieval
- databases