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Verification and reduction of surface charging during high/medium current implantations by implementing plasma damage monitoring.

C. CantinG. GoveG. Polisski
Published in: Microelectron. Reliab. (2009)
Keyphrases
  • three dimensional
  • wide range
  • real time
  • neural network
  • high precision
  • data mining
  • monitoring system
  • model checking
  • formal verification
  • surface features
  • high energy
  • acoustic emission
  • scanning electron microscope