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Verification and reduction of surface charging during high/medium current implantations by implementing plasma damage monitoring.
C. Cantin
G. Gove
G. Polisski
Published in:
Microelectron. Reliab. (2009)
Keyphrases
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three dimensional
wide range
real time
neural network
high precision
data mining
monitoring system
model checking
formal verification
surface features
high energy
acoustic emission
scanning electron microscope