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G. Gove
Publication Activity (10 Years)
Years Active: 2009-2009
Publications (10 Years): 0
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Publications
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C. Cantin
,
G. Gove
,
G. Polisski
Verification and reduction of surface charging during high/medium current implantations by implementing plasma damage monitoring.
Microelectron. Reliab.
49 (2) (2009)
C. Cantin
,
C. Laviron
,
G. Gove
Charging control on high energy implanters: A process requirement demonstrated by plasma damage monitoring.
Microelectron. Reliab.
49 (2) (2009)