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Neural-Net Based Optical Ellipsometry for Monitoring Growth of Semiconductor Films.
Gwang Hoon Park
Yoh-Han Pao
Kurt G. Eyink
Steven R. LeClair
M. S. Soclof
Published in:
AIRTC (1994)
Keyphrases
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neural nets
feed forward
backpropagation neural networks
monitoring system
multi layer
silicon dioxide
neural network
counter propagation
real time
artificial neural networks
back propagation
learning tasks
plasma etching
decision trees
feature selection