SCLP Software for Thermal Process Control of Nanowire Fabrication and Multilayer Nanochip System.
Norma AliasNoriza SatamMohd Shahizan OthmanChe Rahim Che TehMaizatul Nadirah MustaffaHafizah Farhah Saipan SaipolPublished in: SoMeT (2014)
Keyphrases
- process control
- product quality
- control system
- intelligent control
- semiconductor manufacturing
- software development
- infrared
- manufacturing process
- software systems
- software design
- source code
- computer systems
- software architecture
- software tools
- software package
- high density
- case study
- integrated circuit
- development process
- high speed
- user interface
- control charts
- real time