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A modeling framework and flux controller for free molecular flow deposition processes.
Martijn Dresscher
Bayu Jayawardhana
J. J. Barradas Berglind
Jacquelien M. A. Scherpen
Published in:
ACC (2017)
Keyphrases
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modeling framework
control system
educational technology
topic modeling
data mining
control strategy
chemical reactions
neural network
pid controller
thin film