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Vertical-objective-based ellipsometric microscope for backside illuminated real-time visualization of nm-thick lubricant films.

Qingqing LiuKenji FukuzawaYosuke KajiharaHedong ZhangShintaro Itoh
Published in: MHS (2011)
Keyphrases
  • real time
  • control system
  • data visualization
  • data analysis
  • vision system
  • light source
  • data mining
  • genetic algorithm
  • multiple objectives
  • interactive visualization
  • graphics hardware
  • metal oxide