Prediction of the Strain Response of Poly-AlN/(100)Si Surface Acoustic Wave Resonator and Experimental Analysis.

Shuo Chen Zheng You

Published in: Sensors (2016)

Keyphrases

prediction accuracy
si sio
three dimensional
prediction model
wave propagation
prediction algorithm
surface reconstruction
quasi static
d objects
object surface
viewpoint
prediction error
point cloud
surface fitting
low energy electron