High Precision Control for Nano-stage Driven by Magnetostrictive Actuator.

Xinkai Chen Chun-Yi Su

Published in: ICIRA (2) (2013)

Keyphrases

high precision
high recall
control system
control method
high reliability
achieve high precision
high accuracy
optimal control
control theory
process control
control strategy
closed loop
expert systems
neural network
real time
evolutionary algorithm
control program
nano scale