MIMO Data-Driven Feedforward Tuning for the Ultra-precision Wafer Stage Using Rational Basis Functions.
Weicai HuangKaiming YangYu ZhuPublished in: ICIRA (2) (2021)
Keyphrases
- basis functions
- feed forward
- data driven
- neural architecture
- linear combination
- back propagation
- neural network
- activation function
- artificial neural networks
- radial basis function
- neural nets
- recurrent neural networks
- visual cortex
- biologically plausible
- hidden layer
- state space
- feed forward neural networks
- b spline
- matching pursuit
- spherical harmonics
- adaptive neural
- set of basis functions
- reinforcement learning
- wavelet bases
- signal reconstruction
- decision making
- color space
- search algorithm
- recurrent networks
- multiscale