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Thermal radiation sensing using high mechanical Q-factor silicon nitride membranes.
Chang Zhang
Mathieu Giroux
Théa Abdul Nour
Raphael St-Gelais
Published in:
IEEE SENSORS (2019)
Keyphrases
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infrared
high temperature
electrical properties
wide range
artificial intelligence
x ray
high precision
information retrieval
sensor networks
factor analysis
real time
data sets
databases
learning algorithm