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An Effective Layout Decomposition Method for DSA with Multiple Patterning in Contact-Hole Generation.

Yunfeng YangWai-Shing LukHai ZhouDavid Z. PanDian ZhouChanghao YanXuan Zeng
Published in: ACM Trans. Design Autom. Electr. Syst. (2017)
Keyphrases
  • decomposition method
  • tree decomposition
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  • real world
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  • three dimensional
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  • decomposition algorithm