Self-Calibrated Absolute Thickness Measurement of Opaque Specimen Based on Differential White Light Interferometry.
Xu LuYonggui YuanChi MaHaibo ZhuYunlong ZhuZhangjun YuXiaojun ZhangFuqiang JiangJianzhong ZhangHanyang LiJun YangLibo YuanPublished in: IEEE Trans. Instrum. Meas. (2020)