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Self-Calibrated Absolute Thickness Measurement of Opaque Specimen Based on Differential White Light Interferometry.

Xu LuYonggui YuanChi MaHaibo ZhuYunlong ZhuZhangjun YuXiaojun ZhangFuqiang JiangJianzhong ZhangHanyang LiJun YangLibo Yuan
Published in: IEEE Trans. Instrum. Meas. (2020)
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