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Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si3N4 photonic integrated circuits.
Xinru Ji
Rui Ning Wang
Yang Liu
Johann Riemensberger
Zheru Qiu
Tobias J. Kippenberg
Published in:
OFC (2024)
Keyphrases
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integrated circuit
high density
low density
printed circuit boards
electron beam
close proximity
high speed
data center
semiconductor manufacturing
real time
thin film
low memory requirements
databases
image processing
high bandwidth
hardware description language