Equipment design and process control of critical dimensions in lithography.
Yit Sung NgoGeng YangAndi Sudjana PutraKar Tien AngArthur TayZhong Ping FangPublished in: ICCA (2010)
Keyphrases
- process control
- intelligent control
- control system
- manufacturing process
- case study
- product quality
- user interface
- optimal design
- design decisions
- building blocks
- working principle
- semiconductor manufacturing
- design process
- database
- object oriented
- artificial neural networks
- information systems
- information retrieval
- data sets