Yit Sung Ngo

Publication Activity (10 Years)

Years Active: 2010-2010
Publications (10 Years): 0

Publications

Arthur Tay, Hui Tong Chua, Yuheng Wang, Yit Sung Ngo
Equipment Design and Control of Advanced Thermal-Processing Module in Lithography. IEEE Trans. Ind. Electron. 57 (3) (2010)
Yit Sung Ngo, Geng Yang, Andi Sudjana Putra, Kar Tien Ang, Arthur Tay, Zhong Ping Fang
Equipment design and process control of critical dimensions in lithography. ICCA (2010)