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Reliability evaluation of tungsten donut-via as an element of the highly robust metallization.

Verena HeinMarco ErstlingRaj Sekar SethuKirsten Weide-ZaageTianlin Bai
Published in: Microelectron. Reliab. (2016)
Keyphrases
  • highly robust
  • evaluation model
  • evaluation method
  • data sets
  • databases
  • computer vision
  • partial occlusion