Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection.
Jungyu ChoiBobae KimSungbin ImGeonwook YooPublished in: IEEE Access (2022)
Keyphrases
- kernel density estimation
- endpoint detection
- plasma etching
- mean shift
- density estimation
- thin film
- probability density function
- semi supervised
- low density
- higher dimensional
- object segmentation
- density function
- learning algorithm
- machine learning
- high density
- supervised learning
- multiple instance learning
- object detection
- unsupervised learning
- probabilistic model
- object recognition
- data streams
- feature extraction