Detection of Unknown Defects in Semiconductor Materials from a Hybrid Deep and Machine Learning Approach.
Francisco López de la RosaJosé L. Gómez-SirventCorinna KoflerRafael MoralesAntonio Fernández-CaballeroPublished in: IWINAC (1) (2022)
Keyphrases
- machine learning
- false alarms
- detection rate
- pattern recognition
- decision trees
- false positives
- automatic detection
- computer science
- learning systems
- detection accuracy
- object detection
- data sets
- detection algorithm
- deep learning
- computer vision
- explanation based learning
- detection method
- materials science
- defect classification
- learning materials
- transfer learning
- intrusion detection
- anomaly detection
- knowledge discovery
- data analysis
- data mining