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Carrier transport modelling in the inversion layer of submicron semiconductor devices.

Cristiano SalaWim MagnusKristin De Meyer
Published in: Eur. Trans. Telecommun. (1990)
Keyphrases
  • electron beam
  • semiconductor devices
  • x ray
  • integrated circuit
  • design parameters
  • multi layer
  • search algorithm
  • single layer
  • upper layer