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Multiscale Modeling Study of Native Oxide Growth on a Si(100) Surface.

Lukas CvitkovichMarkus JechDominic WaldhörAl-Moatasem El-SayedChristoph WilhelmerTibor Grasser
Published in: ESSDERC (2021)
Keyphrases
  • multiscale
  • si sio
  • three dimensional
  • statistical analysis
  • d objects
  • experimental study
  • theoretical framework
  • image segmentation
  • denoising