Micromachined probes with integrated GaAs Schottky diodes for on-wafer temperature sensing.
Linli XieChristopher M. MooreMichael E. CybereySouheil NadriNoah D. SauberMatthew F. BauwensArthur W. LichtenbergerN. Scott BarkerRobert M. WeiklePublished in: I2MTC (2018)