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Michael E. Cyberey
Publication Activity (10 Years)
Years Active: 2018-2018
Publications (10 Years): 1
Top Topics
Room Temperature
Thin Film
Sensor Fusion
Semiconductor Manufacturing
Top Venues
I2MTC
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Publications
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Linli Xie
,
Christopher M. Moore
,
Michael E. Cyberey
,
Souheil Nadri
,
Noah D. Sauber
,
Matthew F. Bauwens
,
Arthur W. Lichtenberger
,
N. Scott Barker
,
Robert M. Weikle
Micromachined probes with integrated GaAs Schottky diodes for on-wafer temperature sensing.
I2MTC
(2018)