Unified hysteresis and creep compensation in AFM tip positioning with an extended PI model.

Zhiyu Wang Lianqing Liu Zhidong Wang Wenxue Wang

Published in: ICRA (2014)

Keyphrases

theoretical analysis
experimental data
probabilistic model
data sets
high level
management system
parameter estimation
computational model
theoretical framework
machine learning
objective function
expert systems
sensitivity analysis
hybrid model
unified model