Thermal stability of ALD-grown SiO2 and Al2O3 on (010) β-Ga2O3 substrates.
A. E. IslamA. MiesleM. DietzKevin D. LeedyS. GanguliG. SubramanyamW. WangN. SepelakD. DrydenStephen E. TetlakKyle J. LiddyAndrew J. GreenKelson D. ChabakPublished in: DRC (2022)
Keyphrases
- genetic algorithm ga
- electrical properties
- room temperature
- film thickness
- genetic algorithm
- stability analysis
- infrared
- thin film
- neural network
- fitness function
- hybrid algorithm
- high density
- solder ball connect
- hybrid ga
- genetic operators
- particle swarm optimization pso
- optimization method
- evolutionary computation
- ant colony optimization
- simulated annealing
- computational intelligence