DeePEB: A Neural Partial Differential Equation Solver for Post Exposure Baking Simulation in Lithography.
Qipan WangXiaohan GaoYibo LinRunsheng WangRu HuangPublished in: ICCAD (2022)
Keyphrases
- partial differential equations
- level set
- image denoising
- finite difference
- numerical algorithms
- anisotropic diffusion
- numerical solution
- electron beam lithography
- image processing
- fourth order
- image enhancement
- problems in image processing
- differential equations
- electron beam
- neural network
- energy functional
- finite difference method
- multiscale
- numerical methods
- image smoothing
- ordinary differential equations
- numerical scheme
- machine learning
- computer vision
- natural images
- denoising
- regularization method
- boundary value problem
- finite element method
- object recognition
- nonlinear diffusion
- geometric active contours
- high order
- numerical simulations
- biologically inspired