Improved reliability characteristics of Ge MOS devices by capping Hf or Zr on interfacial layer.
Yan-Lin LiKuei-Shu Chang-LiaoYu-Wei ChangTse-Jung HuangChen-Chien LiZhao-Chen GuPo-Yen ChenTzung-Yu WuJiayi HuangFu-Chuan ChuShih-Han YiPublished in: Microelectron. Reliab. (2017)