Using tomographic measurements in process control.

Anna R. Ruuskanen Aku Seppänen Stephen Duncan Erkki Somersalo Jari P. Kaipio

Published in: CDC (2004)

Keyphrases

process control
control system
product quality
semiconductor manufacturing
intelligent control
manufacturing process
image reconstruction
graduate education
measurement noise
fuzzy logic
control charts
measured data
time of flight
real time
x ray
three dimensional
website
databases