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Oxygen and Humidity Sensing Property of a Limiting Current-Type Thin-Film YSZ-Based Sensor on a Micro-Hotplate.
Shunsuke Akasaka
Isaku Kanno
Published in:
IEEE SENSORS (2022)
Keyphrases
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thin film
short circuit
sensor networks
data acquisition
real time
sensor fusion
high density
energy consumption
monitoring system
solar cell
data warehouse
x ray
single image
multi sensor
multi layer
electron microscopy