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Tracking Control of Nanopositioning Stages Using Parallel Resonant Controllers for High-Speed Nonraster Sequential Scanning.
Yi-Dan Tao
Zhiwei Zhu
Qingsong Xu
Han-Xiong Li
Limin Zhu
Published in:
IEEE Trans Autom. Sci. Eng. (2021)
Keyphrases
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tracking control
high speed
nonlinear systems
control law
controller design
adaptive control
adaptive neural
control system
closed loop
fuzzy model
real time
learning rate
fuzzy controller
control scheme
lyapunov function
artificial intelligence
tracking error
genetic algorithm