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Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing.

Yu XinGregory PandraudYongmeng ZhangPaddy J. French
Published in: Sensors (2019)
Keyphrases
  • waveguide
  • electron beam
  • high data rate
  • information retrieval
  • sensor networks
  • electro optic
  • database
  • real time
  • mobile robot
  • computer simulation
  • cross section
  • electron beam lithography