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Electrochemical Nanoimprint Lithography.

Hantao XuLianhuan HanBingqian DuYang WangZhen MaZhong-Qun TianZhao-Wu TianDongping Zhan
Published in: NEMS (2021)
Keyphrases
  • electron beam
  • mass transfer
  • electron beam lithography
  • evolutionary computation