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High-Bandwidth Tracking Control of Piezoactuated Nanopositioning Stages via Active Modal Control.
Yi-Dan Tao
Linlin Li
Han-Xiong Li
Li-Min Zhu
Published in:
IEEE Trans Autom. Sci. Eng. (2022)
Keyphrases
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tracking control
high bandwidth
nonlinear systems
end to end
adaptive neural
control law
low latency
application specific
high density
fuzzy model
control system
adaptive control
general purpose
fuzzy controller
neural network
highly efficient
control scheme
control algorithm
controller design
reinforcement learning