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Passivity-Based Control of Electrostatic MEMS in the Presence of Parasitics.

D. H. S. MaithripalaBalasaheb D. KawadeJordan M. BergWijesuriya P. Dayawansa
Published in: CDC (2006)
Keyphrases
  • control system
  • website
  • control strategy
  • control strategies
  • control method
  • sliding mode
  • impedance control
  • real time
  • data sets
  • genetic algorithm
  • data acquisition
  • optimal control
  • control problems
  • simulation software