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Passivity-Based Control of Electrostatic MEMS in the Presence of Parasitics.
D. H. S. Maithripala
Balasaheb D. Kawade
Jordan M. Berg
Wijesuriya P. Dayawansa
Published in:
CDC (2006)
Keyphrases
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control system
website
control strategy
control strategies
control method
sliding mode
impedance control
real time
data sets
genetic algorithm
data acquisition
optimal control
control problems
simulation software