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Development and Active Disturbance Rejection Control of a Compliant Micro-/Nanopositioning Piezostage With Dual Mode.

Hui TangYangmin Li
Published in: IEEE Trans. Ind. Electron. (2014)
Keyphrases
  • disturbance rejection
  • control system
  • closed loop
  • pid controller
  • control method
  • fuzzy logic
  • limit cycle