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Multilevel statistical process control of asynchronous multi-stream processes in semiconductor manufacturing.
Andrea Schirru
Simone Pampuri
Giuseppe De Nicolao
Published in:
CASE (2010)
Keyphrases
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semiconductor manufacturing
multi stream
statistical process control
process control
control charts
audio visual speech recognition
discrete event simulation
audio visual
hidden markov models
production system
data sets
high dimensional
control system