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Nonlinear compensation method with bang-bang compensator for a high precision stage using synchronous piezoelectric device driver.

Kazuhiro TsurutaKazuya SatoSunao SawadaKouji Kosaka
Published in: AMC (2010)
Keyphrases
  • high precision
  • high recall
  • high accuracy
  • preprocessing
  • clustering method
  • detection method
  • high reliability
  • natural language
  • support vector machine
  • high order