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A 0.23-µg Bias Instability and 1-µg/√Hz Acceleration Noise Density Silicon Oscillating Accelerometer With Embedded Frequency-to-Digital Converter in PLL.

Jian ZhaoXi WangYang ZhaoGuo Ming XiaAn Ping QiuYan SuYong Ping Xu
Published in: IEEE J. Solid State Circuits (2017)
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