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Two-level differential burn-in policy for spatially heterogeneous defect units in semiconductor manufacturing.
Yuan Chen
Tao Yuan
Suk Joo Bae
Yue Kuo
Published in:
Comput. Ind. Eng. (2021)
Keyphrases
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semiconductor manufacturing
discrete event simulation
process control
heterogeneous networks
policy makers
database systems
optimal policy
production system
databases
action selection
allocation policy
defect detection
expected cost
infinite horizon
steady state
search engine
neural network