Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays.

Marcel Tintelott Vivek Pachauri Sven Ingebrandt Xuan Thang Vu

Published in: Sensors (2021)

Keyphrases

high density
high speed
artificial intelligence
plasma etching
face recognition
low cost
database
databases
image processing
multiscale
multi agent
design process
development process