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Identifying Position-Dependent Mechanical Systems: A Modal Approach with Applications to Wafer Stage Control.
Robbert Voorhoeve
Robin de Rozario
Wouter H. T. M. Aangenent
Tom Oomen
Published in:
CoRR (2018)
Keyphrases
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mechanical systems
manufacturing process
kinematic model
motion planning
gait analysis
control system
camera calibration
multi camera