Fault Detection on Variable Length Multivariate Time Series from Semiconductor Manufacturing.
Philip TchatchouaGuillaume GratonMustapha OuladsineJean-François ChristaudPublished in: SENSORS (2023)
Keyphrases
- semiconductor manufacturing
- fault detection
- multivariate time series
- variable length
- fixed length
- multivariate time series data
- fault diagnosis
- human motion
- process control
- temporal patterns
- dimension reduction
- n gram
- production system
- bitstream
- categorical data
- temporal data
- power plant
- spatial structure
- computer vision
- autoregressive
- human body
- spatio temporal