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Detection of oxidation region of flexible integrated circuit substrate based on topology mapping.
Zhiyan Zhong
Yueming Hu
Published in:
Multim. Tools Appl. (2019)
Keyphrases
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integrated circuit
scan statistic
detection algorithm
electron beam
detection method
false positives
region detection
detection accuracy
automatic detection
detection rate
false alarms
event detection
region of interest
anomaly detection
object detection
input image
image regions
connected regions