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A Hybrid Vehicle Dispatching Approach for Unified Automated Material Handling System in 300mm Semiconductor Wafer Fabrication System.
Lihui Wu
Zhongwei Zhang
Jie Zhang
Published in:
IEEE Access (2019)
Keyphrases
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wafer fabrication
dispatching rule
material handling
manufacturing environment
cyclic scheduling
dynamic routing
production line
manufacturing systems
shop floor
production system
cell formation
scheduling problem
real time
genetic algorithm
manufacturing process