Detection of wafer warpages during thermal processing in microlithography.
Weng Khuen HoArthur TayYing ZhouKai YangNi HuPublished in: ICARCV (2004)
Keyphrases
- detection accuracy
- real time
- automatic detection
- thermal images
- detection algorithm
- infrared
- semiconductor manufacturing
- detection scheme
- object detection
- information processing
- false positives
- detection method
- databases
- automated detection
- false alarms
- detection rate
- change detection
- data processing
- digital images
- data mining
- production system
- face detection
- integrated circuit
- process control
- data structure
- information systems
- infrared sensors