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The influence of assisted ion beam bombardment on structure and electrical characteristics of HfSiO dielectric synthesized by DIBSD.

X. M. YangL. J. ZhugeX. M. WuT. YuS. B. Ge
Published in: Microelectron. Reliab. (2011)
Keyphrases
  • transmission line
  • structural properties
  • knowledge base
  • hierarchical structure
  • main factors
  • databases
  • information systems
  • structural information
  • spatial structure
  • physical characteristics
  • electrical properties