Login / Signup
Impact of control plan design on tool risk management: a simulation study in semiconductor manufacturing.
Gloria Rodríguez-Verján
Stéphane Dauzère-Pérès
Jacques Pinaton
Published in:
WSC (2011)
Keyphrases
</>
simulation study
risk management
semiconductor manufacturing
process control
data sets
decision support system
case study
user interface
search space
real time
databases
open source
risk assessment
risk analysis
discrete event simulation
risk evaluation