Reliability of dual-damascene local interconnects featuring cobalt on 10 nm logic technology.
F. GriggioJames PalmerF. PanN. ToledoAnthony SchmitzIlan TsameretR. KasimGerald S. LeathermanJeffery HicksA. MadhavanJ. ShinJ. SteigerwaldA. YeohC. AuthPublished in: IRPS (2018)
Keyphrases
- integrated circuit
- cmos technology
- metal oxide semiconductor
- case study
- technological advances
- logic programming
- input output
- artificial intelligence
- classical logic
- cost effective
- st century
- rapid development
- personal computer
- low power
- modal logic
- real time
- key technologies
- computer systems
- automated reasoning
- multi valued
- data processing
- information systems
- lower cost
- neural network
- deontic logic
- data sets